KOR | CHN

About Us
Products
- Specialty Gas
  - - MAIN
  - · C4F6
  - · WF6
  - · CH2F2
- Secondary Battery Materials
  - - MAIN
  - · LiPF6
  - · LiBF4
- Inorganic Fluorine Compounds
  - - MAIN
  - · AHF
  - · HF 55%/70%
  - · H2SiF6
  - · NH4HF2
  - · HCI
  - · CaSO4
- Refrigerants
  - - MAIN
  - · K-22
  - · K-410A
  - · K-404A
  - · R-134a
  - · K-407C
  - · K-507
  - · K-32
  - · K-4060
  - · K-141b
  - · MDI
  - · R-123
  - · K-23
  - · R-125
  - · R-227ea
ESM
- Environmental Safety
Business Ethics
Customer Support
- Customer Inquiry
Ethics Hotline
- Ethics Hotline

KOR | CHN

Environmental Safety

Environmental Safety

Customer Inquiry

About Us	Products	ESM	Business Ethics	Customer Support	Ethics Hotline
Overview Corporate Culture Vision Management Philosophy Quality Management History Our Offices Ulsan Plant Bundang Office Overseas Business Locations Foosung Technologies (Nantong) Co., Ltd Foosung Advanced Materials (Nantong) Co., Ltd. Suzhou Foosung Chemical Co.,Ltd. R&D About Us R&D Status Research Fields Patents Domestic Patents Overseas Patents Foosung Co., Ltd. History About Hydrogen Fluoride	Specialty Gas C4F6 WF6 CH2F2 high-purity HF C3H2F6 Secondary Battery Materials LiPF6 LiBF4 Inorganic Fluorine Compounds AHF HF 55%/70% H2SiF6 NH4HF2 HCI CaSO4 Refrigerants K-22 K-410A K-404A R-134a K-407C K-507 K-32 K-4060 R-141b MDI R-123 K-23 R-125 R-227ea	Environmental Safety Environmental Safety Policy Environmental Safety Culture Safety Golden Rules Seismic Equipment	Statement of Business Ethics Code of Ethics Code of Conduct	Customer Inquiry	Ethics Hotline

Specialty Gas

C4F6 / WF6

CH2F2

high-purity HF

C3H2F6

C3H2F6

c4f6

六氟丙烷
[C3H2F6]

· 应用	用于半导体刻蚀工艺（Semiconductor Etching Process）的干法刻蚀气体(Dry etching gas)
· 规格	钢瓶材质：Cr-mo，容量：47L / 阀门：DISS716 / 充装重量：45KG

MSDS Download

· Product Specifications

Classification	Unit	Standard
Purity	%	> 99.99
氧气（O2）	ppm	< 5
氮气（N2）	ppm	< 20
氧氟化碳（OFC）	ppm	< 90
水分（H2O）	ppm	< 15
氟化氢（HF）	ppm	< 0.3
铁（Fe）	ppb	< 5
镍（Ni）	ppb	< 5