KOR | CHN

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  - - MAIN
  - · C4F6
  - · WF6
  - · CH2F2
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  - · LiBF4
- Inorganic Fluorine Compounds
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  - · AHF
  - · HF 55%/70%
  - · H2SiF6
  - · NH4HF2
  - · HCI
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  - · K-22
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  - · MDI
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KOR | CHN

Environmental Safety

Environmental Safety

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About Us	Products	ESM	Business Ethics	Customer Support	Ethics Hotline
Overview Corporate Culture Vision Management Philosophy Quality Management History Our Offices Ulsan Plant Bundang Office Overseas Business Locations Foosung Technologies (Nantong) Co., Ltd Foosung Advanced Materials (Nantong) Co., Ltd. Suzhou Foosung Chemical Co.,Ltd. R&D About Us R&D Status Research Fields Patents Domestic Patents Overseas Patents Foosung Co., Ltd. History About Hydrogen Fluoride	Specialty Gas C4F6 WF6 CH2F2 high-purity HF C3H2F6 Secondary Battery Materials LiPF6 LiBF4 Inorganic Fluorine Compounds AHF HF 55%/70% H2SiF6 NH4HF2 HCI CaSO4 Refrigerants K-22 K-410A K-404A R-134a K-407C K-507 K-32 K-4060 R-141b MDI R-123 K-23 R-125 R-227ea	Environmental Safety Environmental Safety Policy Environmental Safety Culture Safety Golden Rules Seismic Equipment	Statement of Business Ethics Code of Ethics Code of Conduct	Customer Inquiry	Ethics Hotline

Specialty Gas

C4F6 / WF6

CH2F2

high-purity HF

C3H2F6

high-purity HF

c4f6

high-purity HF
[Hydrogen fluoride]

· APPLICATION	Gases used in semiconductor diffusion and wafer cleaning processes
· PACKING	Cylinder : SUS316L / Valve : DISS638 / Filling weight (KG) : 10KG, 25KG

MSDS Download

· Product Specifications

Classification	Unit	Standard
Purity	%	> 99.99
H2O	ppm	< 1
N2	ppm	< 1
CH4	ppm	< 1
H2O	ppm	< 5
SiF4	ppm	< 3
As	ppb	< 100
Fe	ppb	< 50